Inside the machine that saved Moore’s Law

To give a sense of scale, if you took the mirror in your bathroom and blew it up to the size of Germany, it would have bumps about five meters high. Blown up to the same size, the smoothest EUV mirror Zeiss’s engineers had yet made—for space telescopes—would have bumps only two centimeters high. These mirrors for ASML would have to be orders of mag... See more